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AAT Announces Better Cleaning for Plastic FOUPs, Carriers for Wafer Processing

29 May 2005

Austin American Technology (AAT) has developed effective cleaning systems and solutions for plastic FOUPs (Front Opening Unified Pods), Front Opening Shipping Boxes (FOSBs), and other plastic wafer handling carriers and devices used in semiconductor processing. The cleaning chemistries in AAT’s conveyorized or batch cleaning systems, plus effective media isolation technology effectively remove such contaminants as inks, fingerprints, oily spots, glue residue, and even silicone mold release agents used in initial plastic parts manufacture. The chemistries do not harm the plastics and will clean them to the required cleanliness (cleanroom) specified levels while preventing recontamination or contamination migration.

AAT’s conveyorized cleaning systems such as the HydroJet and MicroJet offer high-speed cleaning and high-velocity drying with blowers fitted with HEPA filters to preclude any re-contamination, a feature necessary in cleanroom environments and particularly in semiconductor wafer processing. Drying is fast, complete (especially FOUP doors), spot-free and residue-free, and the operator is not exposed to any of the cleaning chemistry.

AAT’s The Mega™ II is a revolutionary closed-loop, solvent regenerative, cleaning system ideal for the stringent demands of FOUP cleaning. This large-capacity batch system features quantitative ion detection and statistical process control capability and automated operation especially suited for the stringent demands of semiconductor processing. Mega™ II wash and rinse cycles incorporate a highly effective spray under immersion process, with strategically located venturi nozzles for maximum cleaning efficiency of odd-shaped parts and system components. The agitation can be controlled to handle hard to clean, tight tolerance part designs; an ultrasonics assist is available as an option for extremely tough cleaning requirements.

AAT cleaning systems for FOUPs and plastic carriers and parts offer closed loop fluids recycling and/or solvent regeneration in an environmentally responsible family of products with tight process control and flexibility. AAT cleaning systems also offer low cost of ownership and operation due to efficient operation, low solvent cost and reduced dragout, fast cycle times, and a variety of cleaning configuration options.

Austin American Technology is the recognized global leader in cleaning technology for industrial cleaning applications ranging from electronics manufacturing to specialized parts cleaning. For more information about AAT cleaners, chemistries, and other products, visit www.aat-corp.com, or contact the company at 12201 Technology Blvd. Austin, Texas 78727 USA, tel. (512)335-6400.

Source: PR Web